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90314100
9Measuring or checking instruments, appliances and machines, not specified or included elsewhere in this chapter; profile projectors

For inspecting semiconductor wafers or devices (including integrated circuits) or for inspecting photomasks or reticles used in manufacturing semiconductor devices (including integrated circuits)

Standard EU duty
0%
VAT
23%
Additional duties / sanctions
0 rules
Docs required
57 docs
Y935X060X061X062X063X064+51
Preferences
ERGA OMNES 0%ERGA OMNES 0%AD 0%CAMER 0%CARI 0%CH 0%CI 0%CL 0%CM 0%CO 0%DZ 0%EBA 0%EC 0%EEA 0%EG 0%EH 0%ESA 0%FJ 0%FO 0%GB 0%GE 0%GH 0%GSP+ 0%IL 0%JO 0%KE 0%KR 0%LB 0%LOMB 0%MA 0%MD 0%MX 0%PG 0%PS 0%SADC EPA 0%SB 0%SM 0%SWITZ 0%SY 0%TN 0%TR 0%VN 0%WS 0%XC 0%XL 0%ZA 0%
Notes
CD333The autonomous Common Customs Tariff duties laid down in Regulation (EEC) No 2658/87 for parts, components and other goods of a kind to be incorporated in or used for aircraft and parts thereof in the course of their manufacture, repair, maintenance, rebuilding, modification or conversion is suspended.In order to benefit from the suspension, the declarant shall present to the customs authorities an Authorised Release Certificate — EASA Form 1, as set out in Appendix I to Annex I to Regulation (EU) No 748/2012, or an equivalent certificate.The certificates which are deemed to be equivalent to Authorised Release Certificates are listed in Annex II to the Regulation (EU) 2018/1517.
CD303The relief from or reduction of customs duties shall be subject to the specific request expressed by the declarant in box 44 "Additional information/Documents produced/Certificates and authorisations", of the Single Administrative Document (SAD)
TM904Preferences granted under the agreement between the European Union and Morocco in force from 19 July 2019.As of 3 October 2025, products originating in Western Sahara subject to controls by the customs authorities of the Kingdom of Morocco shall benefit from trade preferences under the terms of the new Agreement in the form of exchange of letters between the EU and Morocco, The European Union and the Kingdom of Morocco have agreed to allow those products to be identified by reference to the region of origin to be included in the proof of origin and as provided for in Protocol 4.In view of the application of these measures, the origin certificates codes U179 and U180 must be declared.The country code to be entered in the origin declaration when these proofs of origin are used is “EH”.
CD906The list of non-eligible locations and their postal codes is available at the following address: http://ec.europa.eu/taxation_customs/customs/technical-arrangement_postal-codes.pdf
CD500Eligibility to benefit from this preference is subject to the presentation of a proof of origin stating the community origin of the goods, in the context of the agreement between the European Union and the Swiss Confederation.
5

Binding Tariff Information

BTI classification examples

NLgold024-0242

Laser-produced plasma EUV source for semiconductor inspection

metalGRI 1GRI 6
DEgold419/24-1

Ellipsometer for semiconductor wafer thin film analysis

komponenty optyczne i elektroniczneGRI 1GRI 6
DEgold527/24-1

Optical measurement system for semiconductor wafers

komponenty elektroniczne i optyczneGRI 1GRI 6
DEgold715/24-1

Mounting elements for photoelectric sensors

base metal (steel)GRI 1GRI 6
DEgold204/24-1

Laser thickness measurement system

aluminiumGRI 1GRI 6

BTI (Binding Tariff Information) is an official EU customs decision confirming the classification of goods. Valid for 3 years, binding across all EU member states.

Classification scope of subheading 9031 41

Subheading 9031 41 of the Combined Nomenclature covers optical instruments and apparatus designed specifically for inspecting and measuring semiconductor wafers, photolithographic masks and reticles used in the manufacture of integrated circuits and other microelectronic components. Equipment classified here includes critical dimension (CD) metrology systems, overlay metrology tools, optical wafer defect inspection systems, photomask inspection instruments and optical attachments for lithographic steppers and scanners. The distinguishing feature is that the instrument must be designed exclusively or primarily for use in the semiconductor industry, which differentiates this subheading from subheading 9031 49, which covers other optical measuring and checking instruments. The Notes to Chapter 90 and to Section XVI of the CN specify the criterion of application specificity. Classification follows the GRI, particularly Rules 1 and 6. In case of classification doubt, a Binding Tariff Information (BTI) ruling from the competent customs authority is recommended.

Import requirements for optical semiconductor inspection instruments (9031 41)

Importing instruments under subheading 9031 41 into the European Union requires compliance with the Union Customs Code (Regulation (EU) No 952/2013). The importer must hold an EORI number and submit a customs declaration with CN code 9031 41. The commercial invoice must include a detailed technical description: type of instrument, operating principle (e.g. bright-field or dark-field microscopy, interferometry), resolution parameters and confirmation that the product is intended for wafer or photomask inspection. These instruments may be subject to Regulation (EU) 2021/821 on dual-use export controls, given the sensitive nature of semiconductor technology. Importers should verify whether the import requires an authorisation under national or EU export control rules. A CE Declaration of Conformity under the Low Voltage Directive or EMC Directive is required where the equipment contains electrical components. All requirements should be verified in TARIC and applicable regulations prior to importation.

Duty rates and trade measures for subheading 9031 41

MFN duty rates for optical semiconductor inspection instruments under subheading 9031 41 should be verified in the TARIC database. Semiconductor manufacturing equipment is covered by the Information Technology Agreement (ITA) concluded under the WTO, which eliminates tariffs on many products in this category among signatory countries including the USA, Japan, South Korea, Taiwan and China. Preferential rates are also available under EU FTA agreements: CETA, the EU-Japan EPA, the EU-South Korea agreement and the EU-UK TCA. The condition is compliance with rules of origin. Given the strategic importance of semiconductor technology, importers should monitor for potential trade protection measures. VAT is applied on importation. Full information on rates and trade measures is available in the European Commission's TARIC system.

Classification and import of semiconductor wafer inspection optics – subheading

Subheading CN 9031 41 covers semiconductor wafer inspection optics. When importing into the EU, verify applicable duty rates in TARIC, check CE marking requirements (if applicable), and prepare the required customs documentation. Tariff classification should be based on the General Rules of Interpretation (GIR) of the Combined Nomenclature. If classification is uncertain, applying for a Binding Tariff Information (BTI) from the competent customs authority is recommended. Also verify whether the product is subject to import restrictions, sanctions, or licensing requirements.

Frequently asked questions

What is classified under subheading 9031 41 versus subheading 9031 49?
Subheading 9031 41 covers only optical instruments specifically designed for inspecting and measuring semiconductor wafers and photolithographic masks, such as CD metrology systems, overlay metrology tools and wafer defect inspection systems. Subheading 9031 49 covers other optical measuring and checking instruments, including profile projectors and optical comparators. The dividing criterion is the specific design for the semiconductor industry. A BTI ruling is recommended in cases of doubt.
Are instruments under subheading 9031 41 subject to export or import controls in the EU?
Optical semiconductor inspection systems under subheading 9031 41 may be subject to Regulation (EU) 2021/821 on dual-use export controls due to the sensitivity of chip manufacturing technology. When importing into the EU, importers should verify whether the exporting country imposes its own export restrictions and whether the transaction requires an authorisation. Current requirements should be verified in TARIC and applicable export control legislation.
Do wafer inspection machines under CN 9031 41 benefit from the ITA agreement?
Yes, many semiconductor manufacturing and inspection instruments, including those under subheading 9031 41, may benefit from zero duty rates under the WTO Information Technology Agreement (ITA), provided that the conditions regarding origin from an ITA signatory country are met. The current list of goods covered by the ITA and the applicable conditions should be verified in the European Commission's TARIC database before importation.
How to correctly classify semiconductor wafer inspection optics under CN 9031 41?
Semiconductor wafer inspection optics are classified under subheading CN 9031 41 based on the GIR of the Combined Nomenclature. Key criteria are the material, intended use, and functional characteristics of the product. If in doubt, applying for a BT